Spinning Rotor Vacuum Gauge System
Transfer standard, pressure/vacuum measurement
The MKS Spinning Rotor Gauge (SRG) line is a high-vacuum gauge that operates by measuring the amount of viscous drag on a magnetically-levitated spinning ball, which is directly related to the number of molecules in the chamber (i.e. pressure). It is commonly used for calibration and metrology of other high-vacuum gauge sensors such as cold cathode and hot-filament ionization tubes. Its accuracy specification of 1% of reading is guaranteed over the range of 1 x 10-2 Torr (mbar) to 5 x 10-7 Torr (mbar), and it can operate with reduced accuracy up to 1 Torr (mbar). A complete system includes the electronics control unit, a measurement head with cable, and the calibrated ball/flange assembly. The electronics control unit includes both RS232 and USB computer interfaces, as well as two (2) electromechanical trip relays and a high-resolution analog output signal. The SRG-3 Spinning Rotor Gauge System is PTB (Physikalisch-Technische Bundesanstalt, the German National Metrology Institute)-traceable.