2MHz 5kW, 11kW & 13kW RF Plasma Generators
The new KEINOS™ 2MHz plasma generator is the latest product from the industry leading MKS Power Solutions 2MHz product suite. Building on the solid, reliable attributes of the existing 2MHz design, KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
Performance of the KEINOS plasma generator can be enhanced with the additional of the newly released and patented Dynamic Frequency Tuning option. DFT is a significant enhancement over traditional AFT which uses guided search algorithms. Conventional frequency tuning schemes require more than 500 µsec of course and fine steps to search for the minima in reflected power. With DFT, measurement of power distortion is used to quickly and accurately adjust frequency achieving minima in reflected power in less than 50usec. MKS RF generators with DFT reduce plasma stabilization time for 3D NAND etching of channel holes and significantly improve impedance matching for pressure, power and chemistry process changes during atomic layer etch and atomic layer deposition