142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100°C
(1-1000 Torr)

photo - 142A Baratron Absolute Heated Vacuum Switch, Temperature Controlled to 100 degrees C (1-1000 Torr)

The MKS Instruments 142A Absolute Ambient Pressure/Vacuum Switch offers fast, accurate, and reliable protection for vacuum equipment and processes. The 142 is a heated (100°C) manometer designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A has relay outputs that are easily interfaced with alarms, valve actuators, computers, process controllers, and other protection devices.

Features & Benefits:

  • Heated to minimize process effluent buildup
  • Fully adjustable set point for flexibility
  • All-metal, all-welded construction exposes only Inconel® and stainless steel for corrosion resistance
  • Fast response switching - 20 msec

Applications:

The heated 142A helps minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A is deal for protection of expensive equipment or processes such as: high vacuum pumps, mass spectrometers, lasers, plasma systems.

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPressure Range full scaleFittings Compatible withRelay ModeCAD DiagramsPriceQTY
142AA-00001AA1 mmHg (Torr)1/2" diameter tubulationEnergize with pressure increasing123628.dwg
123628.dxf
Quote Only
142AA-00001AB1 mmHg (Torr)1/2" diameter tubulationEnergize with pressure decreasing123628.dwg
123628.dxf
Quote Only
142AA-00001BA1 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure increasing123630.dwg
123630.dxf
Quote Only
142AA-00001BB1 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure decreasing123630.dwg
123630.dxf
Quote Only
142AA-00001DA1 mmHg (Torr)NW 16 KFEnergize with pressure increasing123632.dwg
123632.dxf
Quote Only
142AA-00001DB1 mmHg (Torr)NW 16 KFEnergize with pressure decreasing123632.dwg
123632.dxf
Quote Only
142AA-00010AA10 mmHg (Torr)1/2" diameter tubulationEnergize with pressure increasing123628.dwg
123628.dxf
Quote Only
142AA-00010AB10 mmHg (Torr)1/2" diameter tubulationEnergize with pressure decreasing123628.dwg
123628.dxf
Quote Only
142AA-00010BA10 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure increasing123630.dwg
123630.dxf
Quote Only
142AA-00010BB10 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure decreasing123630.dwg
123630.dxf
Quote Only
142AA-00010DA10 mmHg (Torr)NW 16 KFEnergize with pressure increasing123632.dwg
123632.dxf
Quote Only
142AA-00010DB10 mmHg (Torr)NW 16 KFEnergize with pressure decreasing123632.dwg
123632.dxf
Quote Only
142AA-00100AA100 mmHg (Torr)1/2" diameter tubulationEnergize with pressure increasing123628.dwg
123628.dxf
Quote Only
142AA-00100AB100 mmHg (Torr)1/2" diameter tubulationEnergize with pressure decreasing123628.dwg
123628.dxf
Quote Only
142AA-00100BA100 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure increasing123630.dwg
123630.dxf
Quote Only
142AA-00100BB100 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure decreasing123630.dwg
123630.dxf
Quote Only
142AA-00100DA100 mmHg (Torr)NW 16 KFEnergize with pressure increasing123632.dwg
123632.dxf
Quote Only
142AA-00100DB100 mmHg (Torr)NW 16 KFEnergize with pressure decreasing123632.dwg
123632.dxf
Quote Only
142AA-01000AA1,000 mmHg (Torr)1/2" diameter tubulationEnergize with pressure increasing123628.dwg
123628.dxf
Quote Only
142AA-01000AB1,000 mmHg (Torr)1/2" diameter tubulationEnergize with pressure decreasing123628.dwg
123628.dxf
Quote Only
142AA-01000BA1,000 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure increasing123630.dwg
123630.dxf
Quote Only
142AA-01000BB1,000 mmHg (Torr)Swagelok® 8 VCR® femaleEnergize with pressure decreasing123630.dwg
123630.dxf
Quote Only
142AA-01000DA1,000 mmHg (Torr)NW 16 KFEnergize with pressure increasing123632.dwg
123632.dxf
Quote Only
142AA-01000DB1,000 mmHg (Torr)NW 16 KFEnergize with pressure decreasing123632.dwg
123632.dxf
Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.