EtherCAT® Exhaust Throttle Valve
The T2B EtherCAT® Exhaust Throttle Valve builds on the reliability and performance of the T3B product line and offers fully ETG-compliant EtherCAT communications. The T2B is available in a range of sizes and configurations. The T2B ensures precise and repeatable pressure control for advanced semiconductor and thin film processes.
Available valve sizes: KF40, KF50, NW63, NW80 and NW100
Additional sizes available, contact MKS Applications Engineering.