T2B
EtherCAT® Exhaust Throttle Valve

T2BA EtherCAT Exhaust Throttle Valve - click to enlarge
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The T2B EtherCAT® Exhaust Throttle Valve builds on the reliability and performance of the T3B product line and offers fully ETG-compliant EtherCAT communications. The T2B is available in a range of sizes and configurations. The T2B ensures precise and repeatable pressure control for advanced semiconductor and thin film processes.

Available valve sizes: KF40, KF50, NW63, NW80 and NW100
Additional sizes available, contact MKS Applications Engineering.

Features & Benefits:

  • Fully compliant to ETG.5003.1 Common Device Profile and ETG.5003.2030 Process Control Valve
  • Three motor options for optimizing speed and torque requirements
  • Available with the "F-seal" soft sealing flapper option for reliable pressure control at high pressure setpoints (up to 1 atmosphere)
  • High-performance pressure control either using PID or MKS Model-based Control
  • Heatable valve body (105°C standard, 150°C optional)

Applications:

T2B EtherCAT Exhaust Throttle Valves are suitable for CVD, RTP, or Load Lock Pressure Control in Semiconductor, Solar, Display, or Thin Film Applications.

Configurations:

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Part NumberPriceQTY
T2BA EtherCATĀ® Exhaust Throttle ValveQuote Only

Documents & Downloads:

T2B data sheet
T2B specifications

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.