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AX8580 Fully Integrated Modular Ozone Delivery System
AX8580
Ozone Delivery System, 50 slm per channel, Fully Integrated Modular
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 AX8580 Ozone Delivery System, 50 slm per channel, Fully Integrated Modular
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Specifications

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    >400g/Nm3
  • Flow Rate
    2.5 gpm per generator
  • Feed Gas
    Oxygen, Nitrogen
  • Feed Gas Supply Pressure
    70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    5 - 40°C (41 - 104°F)
  • Cooling Water Temperature Required
    5 - 17°C
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    1 - 3 MΩcm DI
  • Cooling Water Minimum Flow Required
    2.5 gpm per generator
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    5 kw per generator
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    65 Amps max (fully populated system)
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
  • Control Air Pressure
    70 - 100 psig (483 - 689 kPa)
  • Control Air Type
    CDA or dry nitrogen, 40µ filtered
  • Control Air Fitting
    0.25 in. compression (Swagelok®)
  • Exhaust Connection
    6 in. diameter duct opening standard
  • Dimensions
    26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
  • Compliance
    ETL 9700614, SEMI S2-0715
  • Altitude
    Up to 1000 m (3280 ft) above mean sea level

Features

Environmentally Friendly Solution

Ozone has many advantages over other oxidizers as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers the chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. Typical ozone applications include atomic layer deposition (ALD), chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8575 system is configurable with up to four (4) independent channels to support multiple tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. For ultra high concentration processes the system can be configured for up to two (2) channels with an in-rack chiller thereby maintaining the same footprint. The ozone source for each channel is the production-proven AX8415 series ozone generators. It incorporates MKS patented, field proven, high concentration, ultra clean ozone generation technology. The AX8580 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor and status indicator panel. For ozone performance of each output channel, refer to Figures 1 and 2.

Figure 1 - AX8415 Ozone Generator Performance Graph (Single Generator)

Figure 2 - AX8580 Ozone Generator Performance Graph

Resources

Literature

Drawings & CADs

Application Notes

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