Fully Integrated Modular Ozone Delivery System
The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD. This standalone, fully integrated modular ozone system can be equipped with up to (4) AX8415 generators and configured as a multi-channel system to deliver ozone for up to 4 channels, supporting multiple chambers or multiple tools. Flow rates of up to 50 slm per channel and concentrations greater than 400 g/Nm3 are achievable at peak system configuration. Also offered is an optional in-rack chiller for ultra-high concentrations and extended generator lifetime.