High Power Microwave Plasma System
Delivering the Highest Concentration of Radicals

High Power Microwave Plasma System - click to enlarge
click to zoom

The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates. The High Power Microwave Plasma System provides advanced closed loop power control with <1% output accuracy variation for optimal wafer to wafer repeatability.

Features:

  • High power microwave plasma system @ 2.45 GHz
  • Advanced closed loop power control with <1% output accuracy variation
  • Instant plasma ignition
  • Autotune system within <1.5 seconds

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberRated PowerApplicatorPriceQTY
HMPX60Q-MKS6 kWQuartzQuote Only
HMPX60S-MKS4.5 kWSapphireQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.