High Power Microwave Plasma System

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Overview

The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.

High power microwave plasma system @ 2.45 GHz
Advanced closed loop power control with <1% output accuracy variation
Instant plasma ignition
Auto tune system within <1.5 seconds

Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Availability	Featured Item	Price		Brand
		HMPX60Q-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz 6 Weeks	HMPX60Q-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz	UNIVERSAL	0.0	1.0	0.0		0.0	6 Weeks
		HMPX60S-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire 6 Weeks	HMPX60S-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire	UNIVERSAL	0.0	1.0	0.0		0.0	6 Weeks

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Specifications

Maximum Plasma Power Output

6.0 kW
Frequency

2,440-2,470 MHz
Ripple

2,440-2,470 MHz
Output Accuracy

<1% closed loop control
Ambient Temperature

Up to 40°C max
Generator to Head Distance

Up to 100 feet max
Microwave Connections

WR284F waveguide with CPR284F flanges
Power Requirements

200-208 VAC, 3 phase, 50/60 Hz
Autotune

<1.5 seconds with <2% reflected power
Chemistries

O₂, N2H2, N2, H2O, NH3, H2
Applicator Material

Quartz or Sapphire

Gas Flow Range

1 - 10 slm
Operating Pressure

1 - 10 Torr
Communications

Analog, RS485
Compliance

CE
Configuration

KF40, custom
Cooling

Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
Power Supply Generator Dimensions

(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
Power Head Magnetron Head Dimensions

9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
Power Head Magnetron Head Cooling

Water: 1 GPM, 20-30°C, 71 PSI max
Regulation

Better than 1% of output power (line and load)

Specifications

Maximum Plasma Power Output

6.0 kW
Frequency

2,440-2,470 MHz
Ripple

2,440-2,470 MHz
Output Accuracy

<1% closed loop control
Ambient Temperature

Up to 40°C max
Generator to Head Distance

Up to 100 feet max
Microwave Connections

WR284F waveguide with CPR284F flanges
Power Requirements

200-208 VAC, 3 phase, 50/60 Hz
Autotune

<1.5 seconds with <2% reflected power
Chemistries

O₂, N2H2, N2, H2O, NH3, H2
Applicator Material

Quartz or Sapphire

Gas Flow Range

1 - 10 slm
Operating Pressure

1 - 10 Torr
Communications

Analog, RS485
Compliance

CE
Configuration

KF40, custom
Cooling

Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
Power Supply Generator Dimensions

(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
Power Head Magnetron Head Dimensions

9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
Power Head Magnetron Head Cooling

Water: 1 GPM, 20-30°C, 71 PSI max
Regulation

Better than 1% of output power (line and load)