IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controller for Flow Rates from 1 to 100 slm

IM100A IP66-rated, Metal-sealed, Digital Mass Flow Controller - click to enlarge
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The IM100A is a general purpose, metal-sealed MFC, that is well suited for harsh environments where resistance to liquid or dust ingress is critical. It meets these requirements with its IP66 enclosure design.

The IM100A is a digitally-controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. Using the latest in MKS control algorithms, it provides fast and repeatable response to set point throughout the device control range with typical response times on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas. It uses the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and operates with flow rates up to 100 slm, N2 equivalent.

Features & Benefits:

  • IP66-rated enclosure protects against ingress of water and dust from harsh environments
  • Patented thermal sensor design provides exceptional zero stability
  • Percent of set point accuracy (calibration gas) enables precise process control
  • Available in a wide variety of analog & digital I/O interfaces for custom applications
  • Embedded user interface to easily change range & user gas reduces inventory requirements and monitor performance


The IM100A supports a wide variety of applications requiring flow control capability from 1 slm to 100 slm Full Scale, N2 equivalent. With its electropolished surface finish, it is well suited for use in high purity process applications and is available with a normally closed valve. An MFM version is also available (not electropolished).


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Part NumberPriceQTY
IM100AQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.