150/160 & V-100 Series
Single Stage Vacuum Valves

photo - Single Stage Valves

MKS Standard Series Vacuum Valves are designed to insure product quality, reliability, and value. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional O-ring shaft sealed valve. These legacy valves are supported by MKS for configurations not supported by the LoPro product line. For increased cycle life and reduced size, please see the MKS LoPro products.

Features & Benefits:

  • Wide selection of valve sizes and configurations
  • Bellows sealed isolation valve
  • Spring closed for safety
  • Dual acting pneumatic operation available in select sizes


MKS Single Stage Valves function reliably in vacuum applications ranging from semiconductor manufacturing, flat panel display, solar, and research environments.


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Part NumberPriceQTY
150/160 & V-100 ValvesQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.