150/160 & V-100 Series
Single Stage Vacuum Valves
MKS Standard Series Vacuum Valves are designed to insure product quality, reliability, and value. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional O-ring shaft sealed valve. These legacy valves are supported by MKS for configurations not supported by the LoPro™ product line. For increased cycle life and reduced size, please see the MKS LoPro™ products.