Heated Ball Valves
Manual & Pneumatic, Heated Vacuum Ball Valves

photo - MKS Heated Ball Valve

MKS Heated Vacuum Ball Valves have been designed such that the valve body and actuator are separated by an elongated actuator shaft, allowing the entire valve to be heated and insulated to prevent heat loss. The unique ball valve heater covers the entire valve body as well as the stainless steel flange clamps on each end of the valve body. The heater provides complete coverage of the valve, preventing heat loss and maximizing temperature stability inside the valve.

Features & Benefits:

  • Heatable to 150°C (200°C intermittent)
  • Reduce byproduct buildup
  • Particulate-resistant ball/seat design
  • Straight through flow design for maximum conductance
  • Fully stabilized stem eliminates stem leaks to atmosphere and increases valve life

Applications:

MKS Ball Valves are more robust than other valves and are especially useful in "dirty" vacuum applications. Common applications include MOCVD, LPCVD, PECVD, EPI, and metal etch.

Configurations:

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Part NumberPriceQTY
Heated Ball ValveQuote Only

Documents & Downloads:

Heated Ball Valve data sheet

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.