Jalapeño Series
Heated Bellows-sealed Isolation Valves

photo - MKS Jalapeño Heated Bellows-sealed Isolation Valve

MKS Jalapeño heated vacuum valves are specifically designed to withstand high internal temperatures, limiting contaminant buildup and reduce system maintenance. The standard heater for the Jalapeño valve is set to 170°C to achieve a nominal interior temperature of 150°C, but other temperature ranges are optional. From room temperature, the heaters typically reach their set temperature in less than 30 minutes and can be daisy-chained with integral locking connectors. The heaters are wired in parallel and are independently controlled. Jalapeño valves use up to four heat zones, reducing any potential for hot and cold spots. Since each heater is designed to uniformly heat a component, there is no need for costly controllers or thermocouples with messy wires. The legacy lines of MKS Jalapeño valves are available for customers requiring configurations not available as a LoPro Jalapeño product.

Features & Benefits:

  • Reduces unwanted sublimation of process by-products
  • Compact valve design with Silicone foam molded heater jacket
  • Accurate temperature control with microprocessor-controlled thermocouple

Applications:

MKS Jalapeño heated vacuum valves are suited for vacuum processes where elevated temperatures are required to reduce particle buildup on interior surfaces. Successful processes include CVD, etch, LPCVD, and PECVD.

Configurations:

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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.