Ball Valves
Manual & Pneumatic Vacuum Ball Valves

photo - MKS Ball Valve

MKS Vacuum Ball Valves are designed to have a straight thru flow path and are less sensitive to particulate contamination the other vacuum valve styles. The ball is contained in a central vacuum cavity and is opened and closed by turning the stem 90° back and forth (1/4 turn). The sealing seat for the ball wipes the ball clean as it is opened and closed. This feature provides a "self-cleaning" action that makes MKS Ball Valves effective in particle-rich effluent streams. The MKS ball valve design has a fully stabilized stem that eliminates stem leaks common to lower performance ball valves.

Features & Benefits:

  • Particulate-resistant ball/seat design
  • Straight through flow design for maximum conductance
  • Fully stabilized stem eliminates stem leaks to atmosphere and increases valve life
  • Manual or pneumatic actuation

Applications:

MKS Vacuum Ball Valves are more robust than other valves and are especially useful in "dirty" vacuum applications. Common applications include MOCVD, LPCVD, PECVD, EPI, and metal etch.

Configurations:

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Part NumberPriceQTY
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Documents & Downloads:

Ball Valve data sheet

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.