Compact Electric Bellows-sealed Isolation Valves
MKS Electromagnetic compact vacuum valves (ECv) have the same high conductance bellows sealed performance of the Cv Valves, with electrically controlled operation in place of pneumatic or manual control. The ECv valve is operated by a DC powered linear solenoid that serves as the valve actuator and a spring provides safety return when power is removed. Each ECv valve includes a coil saver circuit integrated in-line with the input power cable. The coil saver circuit offers efficient solenoid operation by limiting the power usage of the solenoid once the valve has been actuated. This allows the valve to operate without excessive heat generation and reduces power consumption.