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Description
   CRV Vacuum Isolation Valve, Bellows Sealed, Corrosion & Ozone Resistant

Specifications

  • Type
    Corrosion & Ozone Resistant Bellows-sealed Isolation Valve
  • Vacuum Range
    Atmosphere to 1.0 x 10-9 Torr
  • Port Size
    NW40, NW50
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Cylinder Volume
    2.2 - 6.4 in3, depending on configuration
  • Cylinder Air Pressure
    90 psig ±30 psig
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Electrical Duty Cycle
    100 volts 72%
    120 volts 50%
  • Blow-By Pressure
    NW40: 50 psia
    NW50: 45 psia
  • Actuation Time
    NW40: 270 msec opening, 530 msec closing
    NW50: 450 msec opening, 1130 msec closing
  • Heater Nominal Set Point
    170°C (338°F)
  • Heater Interior Range
    135°-180°C (275°-356°F)
  • Heater Materials
    Molded silicone foam, fiberglass reinforced silicone, Teflon insulated wire
  • Heater Exterior Range
    60°-70°C (140°-158°F)
  • Heater Foam Thickness
    0.5 mm
  • Heater Compliance
    CE, UL E52951 2JR
  • Heater Connectors
    Midget Twist-Lock, nylon, NEMA ML-1
  • Heater Weight Range
    0.5 to 1.5 lbs.
  • Power Cord Current
    12 A maximum
  • LTA Monitor Enclosure
    Black plastic
  • LTA Power Requirements
    90-130 VAC input, 12 VDC ±3 VDC output
  • LTA Power Consumption
    0.3 W
  • LTA Relay Contact Rating
    SPDT, 2 A @ 50 VAC resistive, 1 A @ 30 VDC
  • LTA Input/Output Wiring
    Thermal switch line IN
    Thermal switch line OUT
    Normally closed
    Common
    Normally open
  • LTA Dimensions
    2.58 x 4.76 x 1.46 inches
  • LTA Compliance
    CE
  • Typical Life
    1,000,000 cycles
  • Weight
    3.5 - 6.4 pounds, depending on configuration

Features

TIG Fusion Welded vacuum Grade Body

Another standard feature is a TIG fusion welded vacuum grade body made of highly, corrosion resistant, 304 stainless steel, creating fewer entrapment areas, resulting in less contamination buildup. The Corrosion Resistant Valve is available in angle and inline configurations. Port sizes include NW 40 and NW 50 using maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz®, Perlast® or Gumlast® for higher temperature conditions and increased chemical resistance.

Valve Cut View Showing Shield

Applications

The Corrosion and Ozone Resistant Valve is designed to provide long life in extremely harsh semiconductor or solar processes. This is achieved by shielding the thin wall bellows, limiting bellows exposure to corrosive or reactive gases. Typical processes that require a corrosion resistant valve are CVD and Etch. These processes use gases such as fluorine, chlorine, bromide or ozone. An aluminum shield is recommended for fluorine or ozone while a stainless shield should be used when chlorine or bromide are used. This valve can also be used in exhaust line applications to avoid corrosion of the valve bellows.

Application Schematic

Resources

Application Notes

Literature

Manuals

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