LoPro
Low-profile, Single-stage, Bellows-sealed Poppet Valves

photo - MKS LoPro Low-profile, Single-stage, Bellows-sealed Poppet Valve

MKS LoPro (Low-profile) Vacuum Valves have a small footprint that fits easily into existing, and new, vacuum systems. LoPro Valves are extremely reliable, with a lifetime that can extend to 1,000,000 cycles under clean conditions, greatly increasing system uptime. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions that extends the valves life cycle over a conventional O-ring shaft sealed valve. The bellows' stroke length is optimized to assure a long cycle life while maintaining high conductance.

Features & Benefits:

  • Improved pneumatic actuator design for ease of maintenance
  • Bellows-sealed isolation valve
  • 1,000,000 cycles MTBF (clean conditions)

Applications:

MKS LoPro Valves are designed for high performance in gauge or system isolation. It is ideally suited in vacuum applications such as semiconductor manufacturing, flat panel display, solar, high energy physics research, and thin film deposition.

Configurations:

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Part NumberPriceQTY
LoPro™ Low-Profile ValvesQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.