Temperature-controlled, Digital, EtherCAT® Capacitance Manometer
The e-Baratron® EtherCAT® capacitance manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel®-based capacitance sensor as current MKS Baratron manometer products, offering the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers. It is available in three different operating temperatures (45°, 80°, or 100°C), eleven different Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa), and ten different connection fittings for use in nearly any application or process.