Paragon® H* AX7780/AX7785
Remote Plasma Gas Generators for Hydrogen-based Processes
Building on production proven attributes of Paragon® reactive gas generators, Paragon® H* is designed with new features and enhancements to enable CVD, PVD, and ALD applications in Hydrogen based processes.
The Paragon H* reactive gas generator is designed for Hydrogen flows up to 5 slm and pressures up to 3 Torr enabling process flexibility, decreased processing times and increased throughput. Based on the MKS patented Low-Field-Toroidal plasma technology, Paragon H* incorporates an enhanced plasma block for improved Hydrogen radical output.