DeviceNet™ Capacitance Manometer with Digital Communications
The MKS i-Baratron® DA01A DeviceNet™ Absolute Capacitance Manometer is a dual-output absolute vacuum transducer with both DeviceNet™ digital communications and legacy 0-10 VDC analog output signals.
Available in four different operating temperatures for different applications, the i-Baratron® uses an efficient microprocessor-based digital structure that provides exceptional stability and repeatability under demanding conditions such as semiconductor manufacturing equipment. The i-Baratron® also uses the patented MKS all-welded Inconel® diaphragm sensor, which has exceptionally high resistance to corrosion from common process chemicals and is able to tolerate bursts of pressure to as much as 45 psia (310 kPa) without suffering physical damage or permanent calibration shifts. The DeviceNet™ communications and main power are fed through a bayonet-style 5-pin connector on the top of the product, and the analog output signal is available on the standard 9-pin D-subminiature electrical connector. The product is available in ambient, 45°C, 80°C, and 100°C versions in Full Scale pressure ranges from 1000 to 1 Torr (133 to 0.13 kPa) for the ambient models, and 1000 to 0.1 Torr (133 to 0.013 kPa) for the heated versions. The products are CE marked to meet EMC Directive 2004/108/EC, and compliant with current European Union RoHS (Reduction of Hazardous Substances) directives.