Mass Flow Controller Module
MKS MFC mass flow controller modules provide a compact and high density solution for integrating MKS MFC's with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers that are fully powered and controlled through the MFC slice. Each MKS MFC Module supports integrating 4 MKS mass flow controllers.