Mass Flow Controller Module

photo - MKS MFC Mass Flow Controller Module

MKS MFC mass flow controller modules provide a compact and high density solution for integrating MKS MFC's with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers that are fully powered and controlled through the MFC slice. Each MKS MFC Module supports integrating 4 MKS mass flow controllers.

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Part NumberConnectorPriceQTY
AS11890G-0215 pin D-SubQuote Only
AS11890G-119 pin D-SubQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS or call 512-719-8000.