628E e-Baratron® Ethernet-enabled Heated Absolute Capacitance Manometer
(0.1-1000 Torr), Temperature Controlled to 100°C
Direct, Absolute, Pressure/Vacuum Measurement with Digital Communications

photo - 628E e-Baratron - Ethernet-enabled Heated Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 100 degrees C

The Ethernet-enabled 628E e-Baratron® adds the ability to network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. e-Baratrons® embedded internet browser software allows them to communicate with any Windows®-based PC. The Ethernet port operates in parallel with analog communications, so it can be diagnosed during processing. The 628E e-Baratron® has an an LED status indicator.

Features & Benefits:

  • Both analog and Ethernet communications are compatible with existing and networked process tools
  • Real-time Ethernet communications can be run in parallel with analog communications, for in-situ diagnostics
  • Embedded internet web browser communicates with any Windows®-based PC
  • Graphical User Interface (GUI) for device and process diagnostics

Applications:

High-accuracy semiconductor, flat panel display, and industrial applications that require a heated manometer for repeatable vacuum and pressure measurement.

VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberSensor TypePressure Range full scaleFittingCalibrationAnalog ConnectorDigital ConnectorPriceQTY
628E.1TCEF1B1Standard0.1 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E.1TCEF5B1Standard0.1 mmHg (Torr)Swagelok® 8 VCR® FemaleHorizontal15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E.1TGAF1B1Standard0.1 mmHg (Torr)NW 16KFVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E01TCEE1B1Standard1 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E01TGAE1A1Standard1 mmHg (Torr)NW 16KFVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only
628E01TBAE1B1Standard1 mmHg (Torr)Straight 0.50 inch (12 mm) OD tubeVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only
628E11TCEE1B1Standard10 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E11TGAE1B1Standard10 mmHg (Torr)NW 16KFVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E11TBAE1A1Standard10 mmHg (Torr)Straight 0.50 inch (12 mm) OD tubeVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only
628E13TCEE1B1Standard1000 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E13TGAE1B1Standard1000 mmHg (Torr)NW 16KFVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
628E13TBAE1A1Standard1000 mmHg (Torr)Straight 0.50 inch (12 mm) OD tubeVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.