392 Micro-Ion® Plus
(1x10-9 Torr to Atmosphere) Modular Vacuum Gauge
The MKS, Granville-Phillips® 392 Micro-Ion® Plus Vacuum Gauge Module is a second generation full range pressure measurement module that combines industry-standard Micro-Ion® ionization vacuum gauge technology with a miniature Pirani Conductron® heat-loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
The 392 Micro-Ion® Plus Vacuum Gauge Module combines Granville-Phillips® industry-standard and application-tested Micro-Ion® ionization vacuum sensor with an innovative miniature Pirani Conductron® vacuum sensor in a single gauge assembly with a compact electronics control module. The 392 Micro-Ion® Plus Vacuum Gauge Module compact modular design reduces the number of separate gauges, vacuum interfaces, cabling and control electronics that are typically required for full range pressure measurement. The full range pressure measurement is output as a single analog signal or is available through optional serial RS-485 or DeviceNet™ digital interfaces. Up to three optional set point relays are available, configured for process control with the ability to assign the relays at any pressure across a broad vacuum spectrum. The 392 Micro-Ion® Plus Vacuum Gauge Module is available with or without display, and can be configured with a wide variety of flanges.