390 Micro-Ion® ATM
(1x10-9 Torr to Atmosphere) Modular Vacuum Gauge


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The MKS, Granville-Phillips® 390 Micro-Ion® ATM Vacuum Gauge Module combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

The 390 Micro-Ion® ATM Vacuum Gauge Module's full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet digital interfaces. RS-485 and DeviceNet versions have up to three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

Features & Benefits:

  • Continuous pressure measurement from high vacuum to atmosphere
  • Dual ionization gauge filaments increase equipment uptime
  • Optional setpoint relays for process control
  • Analog, RS-485, or DeviceNet output available
  • Optional graphics LCD display

Common configurations are listed on the "Configurations" tab below. Contact Customer Service for additional configurations.

Configurations:

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Part NumberDescriptionFittingCommunicationRelaysDisplayUnitsPriceQTY
390410-0-YE-TModuleNW25KFAnalog0NoTorrQuote Only
390411-0-YE-TModuleNW25KFAnalog0YesTorrQuote Only
390510-0-YH-TModule1/2 inch VCR maleRS-4850NoTorrQuote Only
390510-0-YG-TModule2.75 inch ConflatRS-4850NoTorrQuote Only
390511-2-YG-TModule2.75 inch ConflatRS-4852YesTorrQuote Only
390610-2-YG-TModule2.75 inch ConflatDevicenet2NoTorrQuote Only
390611-3-YG-TModule2.75 inch ConflatDevicenet3YesTorrQuote Only
390100-YDReplacement GaugeNW16KFn/an/an/aQuote Only
390100-YEReplacement GaugeNW25KFn/an/an/aQuote Only
390100-YKReplacement GaugeNW40KFn/an/an/aQuote Only
390100-YHReplacement Gauge1/2 inch VCR malen/an/an/aQuote Only
390100-YFReplacement Gauge1.33 inch Conflatn/an/an/aQuote Only
390100-YGReplacement Gauge2.75 inch Conflatn/an/an/aQuote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.