390 Micro-Ion® ATM
(1x10-9 Torr to Atmosphere) Modular Vacuum Gauge
The MKS, Granville-Phillips® 390 Micro-Ion® ATM Vacuum Gauge Module combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
The 390 Micro-Ion® ATM Vacuum Gauge Module's full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet™ digital interfaces. RS-485 and DeviceNet™ versions have up to three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.