CV7627D Baratron® Isolation System
(0.05 to 1000 Torr), Temperature Controlled to 45 °C
MKS CV7600 Isolation Systems automatically maintain a heated 600-series Baratron® capacitance manometer at vacuum throughout the process cycle. It consists of a 627D heated process Baratron® Capacitance Manometer, an MKS Instruments Pneumatic Isolation Valve, and an R750C mini-Baratron® Manometer and Relay Module. The R750C Relay Module monitors the process pressure, and provides a contact closure that is used to open or close a (customer-supplied) isolation valve in the pneumatic line to the MKS Instruments Pneumatic Isolation Valve. The solenoid closes the MKS Instruments valve whenever the process pressure exceeds the full-scale range of the manometer, maintaining its optimum working range.