LoPro - Aluminum
Compact Aluminum Body Vacuum Valves

LoPro Compact Aluminum Body Vacuum Valve - click to enlarge
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MKS LoPro (Low-profile) Aluminum Body Vacuum Valves have all the features of a LoPro Valve with a one-piece machined aluminum body made of 6061-T6 Aluminum for applications that require low weight or reduction of exposed Stainless Steel.

Features & Benefits:

  • One-piece machined, high purity corrosion resistant 6061-T6 aluminum body
  • Improved pneumatic actuator design for ease of maintenance
  • 1,000,000 cycles MTBF (clean conditions)


MKS LoPro Valves are designed for high performance in gauge or system isolation. It is ideally suited in vacuum applications such as semiconductor manufacturing, flat panel display, solar, high energy physics research, and thin film deposition.


Purchase now or request a quote:
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Part NumberPriceQTY
LoPro Aluminum Body ValvesQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.