AA02A a-Baratron® Heated Absolute Capacitance Manometers
for General Purpose Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa)
The MKS a-Baratron® manometer is an advanced general purpose absolute heated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where high accuracy and excellent repeatability are crucial to process success. These capacitance manometers are internally heated to 45°, 80°, or 100°C. They use state-of-the-art digital architecture throughout to produce the highest possible long-term performance and reliability. They can be equipped with either the standard sensor or MKS’ patented Etch Baffle sensor technology that greatly reduces process contamination, and they can be configured for both new and existing processing systems. These manometers operate on ±15 VDC or +24 VDC input voltage, and have legacy 0-10 VDC analog serial output signals. Full Scale measurement ranges from 0.1 Torr (13.3 Pa) to 1000 Torr (133.3 kPa) are available.