IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 50 slm
The IE50A Mass Flow Controller is a general purpose, elastomer-sealed MFC with flow control capability from 5 sccm to 50 slm Full Scale, N2 equivalent.
It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.
The IE50A is a digitally-controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) or a variety of digital (RS485, Profibus® and DeviceNet™) I/O. The digital control electronics utilize the latest in MKS control algorithms for fast and repeatable response to set point throughout the control range. Typical response times are on the order of 500 milliseconds. A digital calibration (included) yields 1% of set point accuracy on the calibration gas.
The IE50A uses the standard 3-inch footprint commonly used by mass flow controllers in the 5 sccm to 50 slm flow rate range for use without modifying existing gas lines. The IE50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. All other wetted surfaces are metal. The IE50A comes standard with Viton® seals with options for Buna or Neoprene® allowing it to be used with gases requiring one of these alternatives.