P250A
High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm

P250A Multi-gas/Multi-range Mass Flow Controller for Flow Rates Up to 250 SLM - click to enlarge
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The P250A MFC is a metal-sealed, multi-gas/multi-range mass flow controller capable of ranges from 100 to 250 slm Nitrogen Full Scale flow with a unique control valve design for rapid setpoint response while maintaining closed conductance leak rates well below other high flow MFCs. The P250A, with fast settling time (less than 2 seconds) and one (1) percent of setpoint accuracy outperforms other typical high flow MFCs. The device's control capability extends down to 2% of the P250A's configured full scale. This, combined with the P250A's multi-gas/multi-range capability extends the user's ability to minimize high flow MFC inventory.

The P250A embedded software and Ethernet interface requires no special software or hardware to operate, only a standard web browser and a PC. Critical gas parameters for typical high flow rate gases are already stored on the device. Simply select the gas and specify the full scale flow range to configure the P250A. The interface also enables device diagnostics, plot flow and data storage for offline analysis.

Features & Benefits:

  • Fast response to setpoint reduces stabilization time for short process steps
  • Tightly controlled flow accuracy improves chamber process matching
  • Reduced inlet pressure (pressure drop) requirement can simplify gas supply regulation from a single source
  • Accurate flow control over a wide dynamic range, even when down ranged, reduces need for an additional low range MFC
  • Multi-gas/multi-range capabilities reduces MFC inventory.
  • Embedded configuration & diagnostics software checks MFC functionality without removal from the tool
  • Use a standard web browser; no special software required
  • View flow rate, gas type and full scale flow on LED display

Applications:

The P250A MFC is designed for MOCVD, silicon epitaxy, RTP and diffusion/oxidation applications.