General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve
The GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds.Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GV50A to easily replace RS485 and DeviceNet™ versions of the MKS 2179A MFC with minor coding.
GV50A incorporates a normally-closed, shut-off valve for closure to 4x10E-09 scc/sec of Helium. It incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GV50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements.