LIQUOZON® Stream
High Output 140 slm Ozone Water Delivery System

LIQUOZON Stream High Output 140 slm Ozone Water Delivery System - click to enlarge
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LIQUOZON® Stream Ozonated Water Delivery System is a powerful source of dissolved ozone for wet wafer processing especially in multi-chamber single wafer tools with applications requiring up to 140 lpm flow and ozone concentrations of 115 - 25 ppm.

LIQUOZON® Stream system delivers ozonated ultra pure water (DIO3) at a pressure of up to 2.8 bargauge (0.28 MPa) and at flow rates of up to 140 L/min. The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. LIQUOZON® Stream is designed to deliver a stable O3-in-water concentration under constant controlled pressure even for varying DIO3 demands. Several different models of the LIQUOZON® Stream are available to suit varied performance requirements.

Performance:

LIQUOZON® Stream Dissolved Ozone Concentration & Flow

LIQUOZON® Stream Typical Installation Schematic

Features & Benefits:

  • Greater than 115 ppm dissolved ozone
  • Ozonated water flow up to 140 lpm
  • Constant ozone concentration & pressure at varying flow rates
  • Space-saving footprint
  • Faster, Easier Installation and Operation

Applications:

LIQUOZON® Stream Ozonated Water Delivery System is designed for wet wafer processing especially in multi-chamber single wafer tools and applications requiring high output, such as wet wafer cleaning, contaminant removal, surface conditioning, water mark removal and oxide growth.