High Output 140 slm Ozone Water Delivery System
LIQUOZON® Stream Ozonated Water Delivery System is a powerful source of dissolved ozone for wet wafer processing especially in multi-chamber single wafer tools with applications requiring up to 140 lpm flow and ozone concentrations of 115 - 25 ppm.
LIQUOZON® Stream system delivers ozonated ultra pure water (DIO3) at a pressure of up to 2.8 bargauge (0.28 MPa) and at flow rates of up to 140 L/min. The integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration. LIQUOZON® Stream is designed to deliver a stable O3-in-water concentration under constant controlled pressure even for varying DIO3 demands. Several different models of the LIQUOZON® Stream are available to suit varied performance requirements.