elite
RF Plasma Generators
750, 600, & 300 Watt, 13.56 MHz RF Power Supplies

elite Series RF Plasma Generators - click to enlarge
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elite RF plasma generators provide state-of-the art technology in a compact air-cooled package. Each elite RF Power Supply is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. Its design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.

Features & Benefits:

  • Air cooled for lower facilities cost - does not require connection to factory cooling loop
  • High efficiency design, DC to RF efficiency of >85% for low power consumption
  • Compact half rack enclosure enables direct tool mounting
  • Integrated single board design eliminates cables and connectors

Applications:

elite RF Plasma Generators may be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for Solar, LED, MEMs and semiconductor applications.

Load Dynamic Range
Worst phase forward power referenced to rating
VSWR elite 750 elite 600 elite 300
1.1:1 750 W 600 W 300 W
1.5:1 600 W 600 W 300 W
2.0:1 486 W 486 W 300 W
3.0:1 384 W 384 W 300 W
inf:1 200 W 200 W 200 W

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPowerRack SizeInterfaceFront Panel LCDPriceQTY
elite 750FA-01750 WattsFull Rack25 pin Analog, RS232NoQuote Only
elite 750FD-01750 WattsFull RackDeviceNet, 25 pin Analog, RS232YesQuote Only
elite 750FP-01750 WattsFull RackProfibus, RS232YesQuote Only
elite 600FA-01600 WattsFull Rack25 pin Analog, RS232NoQuote Only
elite 600FD-01600 WattsFull RackDeviceNet, 25 pin Analog, RS232YesQuote Only
elite 600FP-01600 WattsFull RackProfibus, RS232YesQuote Only
elite 600HA-01600 WattsHalf Rack25 pin Analog, RS232NoQuote Only
elite 600HD-01600 WattsHalf RackDeviceNet, 25 pin Analog, RS232YesQuote Only
elite 600HP-01600 WattsHalf RackProfibus, RS232YesQuote Only
elite 300HA-01300 WattsHalf Rack25 pin Analog, RS232NoQuote Only
elite 300HD-01300 WattsHalf RackDeviceNet, 25 pin Analog, RS232YesQuote Only

Related Products:

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 585-427-8300.

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