AX2600 & AX2700 Series Microwave Plasma Subsystems

MKS AX2700 Microwave Plasma Subsystem - click to enlarge
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MKS Instruments ® AX2600 and AX2700 Series Microwave Plasma Subsystems are complete, ready-to-integrate microwave plasma solutions. These microwave plasma delivery systems include the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and AX7610 Microwave Applicator.

Based on MKS' highly reliable, field-proven microwave plasma technology, AX2600 and AX2700 Series microwave plasma solutions deliver highly concentrated atomic species.

Suitable for multiple chemistries, the high speed and precision of MKS plasma system automatic tuning guarantee immediate ignition and fast transition from plasma conditions for high productivity.

Robust closed loop control ensures high accuracy, precision and optimal repeatability of the process from wafer to wafer and system to system.

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Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.