AX2600 and AX2700 Microwave Plasma Subsystems
Overview
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
- 3 kW Power
- Accurate power measurement, closed loop control and automatic plasma tuning
- Precise microwave generator with closed loop control power regulation
- Delivers high productivity with fast tune times < 1 sec in various chemistries
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning
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AX2600-AX2700 Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning |
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Specifications
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TypeAX2600 & AX2700
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Maximum Plasma Power Output1.8 or 3.0 kW
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Frequency2440 - 2470 MHz
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Output Accuracy±1.5% (from 20 - 100% of max. power)
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Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
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ChemistriesO2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
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Applicator MaterialQuartz, Sapphire
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Operating Pressure2 - 8 Torr
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CommunicationsAnalog, RS485, DeviceNet™ or EtherCAT®
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ComplianceCE, ETL, SEMI S2-93A, SEMI F47
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Time to Match< 2 sec
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Total Gas Flow1 - 7 slm
Features
Flexibility
- Microwave plasma sources, available for fluorine or non-fluorine chemistries, are designed for high power with multiple gases, flows and pressure ranges
- Subsystems are lid mountable and configurable to accommodate available chamber real estate
- Process changes are handled by the flexible system software and require no hardware modification
- Quartz and Sapphire version to adapt multiple chemistries
Reliability
- MKS microwave plasma subsystems are fully integrated and tested for true turnkey implementation
- Components have been optimized for long life, reducing cost of ownership
- Based on MKS's highly reliable, field proven technology, MTBF exceeds 100,000
- Secure operations with analog control and remote only versions
AX2600 Series
The AX2600 Series is a fully integrated, “packaged” solution designed for easy on-chamber integration. The AX2600 system includes the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and the patented AX7610 Microwave Applicator
AX2700 Series
The AX2700 Series, provided in kit form, consists of all components necessary for microwave plasma processing and is ideal for customers looking to optimize placement of the individual components on a system. All AX2700 system components are highly reliable, factory tested, and field-proven.
SmartPower™ System Performance
SmartPower system performance with 50% NH3 / 50% N2 plasma at 3kW
Relative Strip Rates
Relative strip rates for quartz applicator with oxygen plasma, compared to 7slm flow @ 2 kW
Resources
Literature
- AX2600 & AX2700 Series Microwave Plasma Subsystems (217.5 kB, PDF)
Ultra-High Velocity