Multi-Channel Ozone Delivery System with In-rack Chiller

SEMOZON AX8575 Multi-Channel Ozone Delivery System with In-rack Chiller - click to enlarge
click to zoom

SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.

Ozone Performance:

AX8575 Non-Chiller System Performance - click to enlarge
Concentration and Flow Diagram - click to zoom
AX8575 Multi Generator In-rack Chiller Performance - click to enlarge
System Flow and Configuration - click to zoom

Features & Benefits:

  • Concentrations up to 350g/Nm3 at higher flow rates to meet new process requirements.
  • Fast & easy installation with minimal connections.
  • Supports single or multiple process tools for efficiency and lower cost of operation.
  • Flexible - each channel can be process matched individually.


The SEMOZON® AX8575 Ozone Delivery System is specifically designed for applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.


Purchase now or request a quote:
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Part NumberPriceQTY
AX8575Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.