LIQUOZON® PrimO3
Ozonated Water Delivery System with Optional Recirculation

LIQUOZON PrimO3 Ozonated Water Delivery System with Optional Recirculation
click to zoom

LIQUOZON® PrimO3 Ozonated Water Delivery System is a powerful source for wet wafer processing with ozone, especially in multi chamber single wafer tools. An optional pump at the DIO3 outlet allows subfloor installation and a pressurized recirculation loop. Moreover, the reclaiming of unused pressureless DIO3 is possible with the new 'ReClaim' option.

As a part of the production proven family of LIQUOZON® systems, the LIQUOZON® PrimO3 series is based on the same highly reliable patented SEMOZON® ozone generating and dissolving technology.

Performance:

Concentration and Flow Diagram - click to enlarge
Concentration and Flow Diagram - click to zoom
System Flow and Configuration Diagram (typical) - click to enlarge
System Flow and Configuration - click to zoom

Features & Benefits:

  • Compact footprint with excellent performance and reliability
  • Faster, easier installation, system integration and operation
  • Clean, safe alternative to conventional chemical processing
  • Low cost of ownership

Applications:

LIQUOZON® PrimO3 is a powerful source for wet wafer processing with ozone especially in multi-chamber single wafer tools for:

  • Wet wafer cleaning
  • Contaminant removal
  • Surface conditioning
  • Water mark removal
  • Oxide growth