Ozonated Water Delivery System with Optional Recirculation
LIQUOZON® PrimO3 Ozonated Water Delivery System is a powerful source for wet wafer processing with ozone, especially in multi chamber single wafer tools. An optional pump at the DIO3 outlet allows subfloor installation and a pressurized recirculation loop. Moreover, the reclaiming of unused pressureless DIO3 is possible with the new 'ReClaim' option.
As a part of the production proven family of LIQUOZON® systems, the LIQUOZON® PrimO3 series is based on the same highly reliable patented SEMOZON® ozone generating and dissolving technology.