623F Baratron® Absolute Capacitance Manometer
(10-1000 Torr) with Trip Points
Direct, Absolute, Analog Pressure/Vacuum Measurement - Ambient Temperature Operation

photo - 623F Baratron Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays

The MKS 623F Absolute Capacitance Manometer features two user adjustable process trip point relays, each with an adjustment range from 0.1% to 100% of Full Scale or voltage equivalent 0.01 to 10 VDC. Dual color LEDs indicate relay status. Typical relay uses include pump cross-over and valve activation. The 623F is an ambient temperature transducer, and is available in Full Scale ranges of 10, 20, 100, 500, and 1000 Torr. The instrument operates with ±15 VDC (±5%) input at <100 mA, and provides an output of 0 to 10 VDC linear with pressure. The 623F's sensor exposes only Inconel® to the process permitting the use with corrosive or dirty gases. Measurements are independent of gas composition.

Features & Benefits:

  • Percent of Reading accuracy for more repeatable output signal
  • Two process trip point relays with LED indicators and voltage test points
  • Measures total pressure directly, independent of gas composition
  • All Inconel® corrosion resistant wetted surfaces
  • Integrated sump (US Patent #5,822,685) provides particle protection
  • High overpressure rating for improved reliability
  • All Inconel® sensor—corrosion resistant wetted surfaces
  • Cleanroom-compatible stainless steel package
  • Compatible with earlier Baratron® capacitance manometers, MKS power supply/readout modules and pressure controllers
  • CE and RoHS compliant

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberPressure Range full scaleFittingAccuracyPriceQTY
623F11TBE10 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F11TDE10 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only
623F12TBE100 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F12TDE100 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only
623F13TBE1000 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F13TDE1000 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.