623F Baratron® Absolute Capacitance Manometer
(10-1000 Torr) with Trip Points
Direct, Absolute, Analog Pressure/Vacuum Measurement - Ambient Temperature Operation

photo - 623F Baratron Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays

The MKS 623F Absolute Capacitance Manometer is a RoHS (Restriction of Hazardous Substances) compliant version of the latest MKS family of general purpose capacitance manometers. It features two user adjustable process trip point relays, each with an adjustment range from 0.1% to 100% of Full Scale or voltage equivalent 0.01 to 10 VDC. Dual color LEDs indicate relay status. Typical relay uses include pump cross-over and valve activation. The 623F is an ambient temperature transducer, and is available in Full Scale ranges of 10, 20, 100, 500, and 1000 Torr. The instrument operates with ±15 VDC (±5%) input at <100 mA, and provides an output of 0 to 10 VDC linear with pressure. The 623F's sensor exposes only Inconel® to the process permitting the use with corrosive or dirty gases. Measurements are independent of gas composition.

Features & Benefits:

  • Percent of Reading accuracy for more repeatable output signal
  • Two process trip point relays with LED indicators and voltage test points
  • Measures total pressure directly, independent of gas composition
  • All Inconel® corrosion resistant wetted surfaces
  • Integrated sump (US Patent #5,822,685) provides particle protection
  • High overpressure rating for improved reliability
  • All Inconel® sensor—corrosion resistant wetted surfaces
  • Cleanroom-compatible stainless steel package
  • Compatible with earlier Baratron® capacitance manometers, MKS power supply/readout modules and pressure controllers
  • CE and RoHS compliant

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberPressure Range full scaleFittingAccuracyPriceQTY
623F11TBE10 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F11TDE10 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only
623F12TBE100 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F12TDE100 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only
623F13TBE1000 mmHg (Torr)Swagelok® 8 VCR® female±0.25% of ReadingQuote Only
623F13TDE1000 mmHg (Torr)NW 16 KF±0.25% of ReadingQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.