ASTRON®hf+ AX7635 Remote Plasma Source
(rated to 22.0 slm NF3 flow)
Higher flow (22 slm of NF3) - increased ignition range capability (1 to 6 slm of AR at 1 to 4 Torr)
The ASTRON®hf+ reactive gas generator is designed for increased flow capability and process flexibility. The ASTRON®hf+ reactive gas generator increases overall flow to 22 SLM of NF3 for decreased processing time and increased throughput.
Based on patented Low-Field-Toroidal plasma technology, the ASTRON®hf+ reactive gas generator provides a broader range of operating pressures while maintaining a high input gas dissociation rate. The high reliability, field-proven design architecture combines the power source, control module, and plasma chamber. The result is a compact, lid-mountable unit, which is easy to integrate.