974B QuadMag Cold Cathode/MicroPirani/Piezo Vacuum Transducer
(1x10-8 to 1500 Torr)
Cold Cathode, MicroPirani, & Piezo pressure/vacuum gauges

photo - 974B QuadMag Cold Cathode/MicroPirani/Piezo Transducer Vacuum Gauge

The 974B QuadMag vacuum transducer combines cold cathode inverted magnetron, MicroPirani and Piezo differential vacuum sensor technologies. In addition to its small size, broad range and lower cost, the 974B can be operated via digital communication or as an autonomous analog unit.

Features & Benefits:

  • Small footprint design provides a compact vacuum gauge solution that saves tool space
  • User serviceable to decrease downtime
  • Both analog and digital communication
  • Low cost multi-sensor design
  • Optional local display

Applications:

The 974 has been specifically designed for pressure measurement within a vacuum load lock. It has the capability to replace multiple pressure measurement devices on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities.

  • Analytical equipment (mass spectrometer control)
  • Scanning electron microscopes
  • Coating systems
  • Semiconductor loadlock pressure control
  • General vacuum base pressure measurement

Configurations:

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Part NumberFittingCommunicationConnector RelaysSealDisplaySTEP filePriceQTY
974B-21020NW 25 KFRS232/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-2xxxKF25.stpQuote Only
974B-21024NW 25 KFRS232/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-2xx4KF25.stpQuote Only
974B-21030NW 25 KFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-2xxxKF25.stpQuote Only
974B-21034NW 25 KFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-2xx4KF25.stpQuote Only
974B-22020NW 25 KFRS485/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-2xxxKF25.stpQuote Only
974B-22024NW 25 KFRS485/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-2xx4KF25.stpQuote Only
974B-22030NW 25 KFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-2xxxKF25.stpQuote Only
974B-22034NW 25 KFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-2xx4KF25.stpQuote Only
974B-710202 3/4 inch CFRS232/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-7xxxCF2.75.stpQuote Only
974B-710242 3/4 inch CFRS232/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-7xx4CF2.75.stpQuote Only
974B-710302 3/4 inch CFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-7xxxCF2.75.stpQuote Only
974B-710342 3/4 inch CFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-7xx4CF2.75.stpQuote Only
974B-720202 3/4 inch CFRS485/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-7xxxCF2.75.stpQuote Only
974B-720242 3/4 inch CFRS485/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-7xx4CF2.75.stpQuote Only
974B-720302 3/4 inch CFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-7xxxCF2.75.stpQuote Only
974B-720342 3/4 inch CFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-7xx4CF2.75.stpQuote Only
974B-91020NW 40 KFRS232/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-9xxxKF40.stpQuote Only
974B-91024NW 40 KFRS232/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-9xx4KF40.stpQuote Only
974B-91030NW 40 KFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-9xxxKF40.stpQuote Only
974B-91034NW 40 KFRS232/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-9xx4KF40.stpQuote Only
974B-92020NW 40 KFRS485/AnalogSUBD 15pin, HD male-no relayViton®none971_972_974-9xxxKF40.stpQuote Only
974B-92024NW 40 KFRS485/AnalogSUBD 15pin, HD male-no relayViton®Yes971_972_974-9xx4KF40.stpQuote Only
974B-92030NW 40 KFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®none971_972_974-9xxxKF40.stpQuote Only
974B-92034NW 40 KFRS485/AnalogSUBD 15pin, HD male-3 relaysViton®Yes971_972_974-9xx4KF40.stpQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.