GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW
High-Reliability RF Plasma Generators

photo - GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators

GHW RF plasma generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.

GHW Series RF Plasma Geneators are available at 208 VAC and 400/480 VAC.

Features & Benefits:

  • Auto-Frequency Tuning (optional) allows fixed matching networks - faster tuning and lower system cost.
  • Excellent Reliability - increased uptime and lower cost of ownership.
  • Automatic load mismatch protection guards against over-dissipation from adverse loads.
  • Unlimited load impedance range for stable power into any load.

Applications:

GHW RF plasma generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.

All MKS Instruments' RF Generators are NRTL certified and CE marked.

Mismatched Power Output
Worst phase forward power referenced to rating
VSWR GHW-12 GHW-25 GHW-50
1.1:1 1250 W 2500 W 5000 W
2.0:1 1000 W 2000 W 3250 W
3.0:1 650 W 1500 W 2000 W

Configurations:

Purchase now or request a quote:
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Part NumberDescriptionPriceQTY
GHW50Genesis 13.56 MHz, 5 kW, RF Plasma GeneratorQuote Only
GHW25Genesis 13.56 MHz, 2.5 kW, RF Plasma GeneratorQuote Only
GHW12Genesis 13.56 MHz, 1.25 kW, RF Plasma GeneratorQuote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 585-427-8300.

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