683B "Smart" Exhaust Throttle Valve with Integrated Controller for DeviceNet™ Networks
The MKS 683 Intelligent Exhaust Throttle Valve is specifically designed for computer integrated applications where a simple pressure control system is desired. The 683B "Smart" Exhaust Throttle Valve integrates all control, communication, and driver circuits via a compact "add-on" electronics module onto an MKS 253 Throttle Valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The second generation PID control algorithm can be tuned to drive the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters.