Integrated LoPro (ILP)
Low-profile, Integrated Two Stage, Soft-start Isolation Valve

photo - MKS Integrated LoPro (ILP) Low-profile, Integrated Two Stage, Soft-start Isolation Valve

MKS Integrated LoPro (ILP) valves are pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure defined by the users control sequence. In the second stage, the main valve opens, allowing use of full pumping speed.

Features & Benefits:

  • Compact design - Two valves in one compact body for system space savings
  • Adjustable conductance for variable pumpdown speed
  • Eliminates the need for small bypass lines
  • Reduced turbulence and contamination during pumpdown
  • Visual and electrical valve position indicators


MKS Integrated LoPro (ILP) valves accommodate the space constraints found on vacuum applications like loadlock and transfer chambers, specifically in semiconductor or optical processing for which a cleaner environment is necessary. With the integrated slow pumpdown feature, turbulent flow is diminished, reducing particle contamination.


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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.