Integrated LoPro (ILP)
Low-profile, Integrated Two Stage, Soft-start Isolation Valve

photo - MKS Integrated LoPro (ILP) Low-profile, Integrated Two Stage, Soft-start Isolation Valve

MKS Integrated LoPro (ILP) valves are pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure defined by the users control sequence. In the second stage, the main valve opens, allowing use of full pumping speed.

Features & Benefits:

  • Compact design - Two valves in one compact body for system space savings
  • Adjustable conductance for variable pumpdown speed
  • Eliminates the need for small bypass lines
  • Reduced turbulence and contamination during pumpdown
  • Visual and electrical valve position indicators

Applications:

MKS Integrated LoPro (ILP) valves accommodate the space constraints found on vacuum applications like loadlock and transfer chambers, specifically in semiconductor or optical processing for which a cleaner environment is necessary. With the integrated slow pumpdown feature, turbulent flow is diminished, reducing particle contamination.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPriceQTY
Integrated LoPro™ (ILP) ValveQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.