Residual Gas Analyzers (RGA)
Quadrupole Mass Spectrometer, Residual Gas Analysis, Process Monitor, & Process Control Products

Residual Gas Analyzers are an effective tool to analyze system gas loads resulting from real leaks, virtual leaks or chamber wall outgassing. RGAs have a number of advantages over traditional, dedicated gas leak detectors including the ability to differentiate between different gas species, comparable sensitivity levels, the ability to detect internal or "virtual" leaks and to detect and analyze outgassing problems.

Microvision 2 Flexible, Integration-ready High Performance Residual Gas Analyzer (RGA)

photo - Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA)

For general residual gas analysis, the performance of MicroVision 2 residual gas analyzer, coupled to the wide range of configurations available, make it the ideal choice for many different residual gas analyzer applications, including ultra high vacuum (UHV), such as vacuum coatings, accelerators and high energy physics, harsh environments, such as high temperature and ionizing radiation, high performance, research and development for high mass species studies, and high resolution studies, including low molecular weight species studies and helium from Deuterium studies.

e-Vision 2 RGA General Purpose Residual Gas Analyzer

photo - e-Vision 2 General Purpose Residual Gas Analyzer (RGA)

The web-enabled e-Vision 2 residual gas analyzer represents a significant advance in Residual Gas Analysis (RGA) technology, opening up new possibilities for vacuum monitoring and e-diagnostics. With an unprecedented range of instrument control options, e-Vision 2 residual gas analyzer is designed to make vacuum troubleshooting and monitoring of chamber residual gases straightforward.

HPQ3 and HPQ3-S High pressure RGA

photo - HPQ3 High pressure RGA

These systems allow operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument.