RGA Vacuum Process Monitor
Process Mass Spectrometry Residual Gas Analysis

photo - Vision 2000-C and Vision 2000-E RGA for CVD and Etch Processes

MKS Process Monitor products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including CVD, Etch, and PVD for process gas analysis.