Process Monitors
Process Monitoring with Mass Spectrometry/Residual Gas Analyzers

photo - Vision 2000-C XD and Vision 2000-E XD High Sensitivity RGA for CVD and Etch Processes

MKS Process Monitor products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.

Each system is specifically designed to monitor, alarm and help control the conditions found within these applications:

For the most demanding applications where optimum sensitivity and reproducibility is required the process mass spectrometry range is available with V-lens patented technology (Vision 2000-C XD, Vision 2000-E XD, Vision 2000-P XD) which allows for a significantly reduced background noise and enhanced sensitivity.