Downstream Valves and Pressure Controllers
MKS is the established leader in downstream pressure control subsystems which integrate exhaust throttle valves, advanced digital controllers and Baratron® process manometers. Our total solutions provide higher throughput with faster set points, reduced overshoot/undershoot, and increased uptime. Downstream Pressure Control Valves are used downstream of the vacuum chamber to throttle the gas flow exiting the system.
Butterfly/Throttle Valves with Integrated Controllers
Butterfly/Throttle Valves with Remote Controllers