Flow Ratio Controllers

photo - DELTA Flow Ratio Controller

Optimizing process performance just became easier with the DELTA Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber. Send the DELTA Flow Ratio Controller (FRC) a gas - or any mixture - and a ratio set point and the DELTA Flow Ratio Controller (FRC) will divide the gas into separate output channels automatically.