Traps & Effluent Management
Inappropriate handling of the downstream effluents in some thin film manufacturing processes can lead to yield losses and excessive equipment downtime due to clogged forelines, damaged pumps and valves, and contaminated transducers. Clogged lines simultaneously reduce flow conductance and raise particle counts. Effluent problems can also create serious safety issues. MKS has developed a series of traps and effluent management solutions to help maintain clear piping.