Microwave Generators
Alter® & ASTeX® Microwave Generators from MKS Instruments

photo - AX2500 Series SmartPower Generators

AX2500 Series SmartPower® Generators

SmartPower® intelligent microwave power generator are a cost effective, field-proven, high performance family of microwave generators for demanding semiconductor fabrication and plasma applications. They provide microwave power for 1.8kW, 3kW and 6kW, at 2450 MHz.

Features:

  • Water cooled system
  • Closed loop power control
  • Power accuracy ±1.5% of Full-scale
  • Digital remote I/O, RS 485

learn more  |  data sheet

photo - SG Series Solid State Microwave Generator

SG Series Solid State Microwave Generators

SG Series Solid State Microwave Generators use the latest and most powerful high frequency transistors, enabling breakthrough performance in modern solid state microwave technology. SG Series generators provide microwave power up to 450W at 2400-2500 MHz.

Features:

  • Extremely compact
  • Wide input voltage range accommodates various facility requirements
  • Includes isolator protection
  • Automatic Frequency Tuning (AFT) feature to assist with minimizing reverse to forward power ratio
  • Remote and manual operation

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photo - AL20000 Series 2450 MHz Industrial Microwave Generator

AL20000 Series 2450 MHz Industrial Microwave Generators

AL20000 Series Industrial Microwave Generators with remote head provide 2kW to 15kW microwave power at 2450 MHz. The AL20000 Series is built with proven experience in producing rugged and reliable switch mode microwave generators for optimum ROI in industrial applications

Features:

  • Air and water cooled generators
  • Air-cooled, switch mode power supplies
  • Highly efficient & light weight
  • Digital and analog I/O

learn more  |  data sheet

photo - GS Series 915 MHz Industrial Microwave Generator

GS Series 915 MHz Industrial Microwave Generators

GS Series industrial microwave generators provide 15kW to 75kW microwave power at 915 MHz. GS Series design includes the proven switch mode power supply system that enables light weight and compact systems. GS Series solutions enable future power upgrades in industrial applications, offering maximum flexibility.

Features:

  • Input 3x400V (or 480V)
  • Microwave protection in shielded cabinet.
  • Continuous power line control
  • Safety Interlocks, alarm management
  • Remote control (local is option) with various options for interface and controls

learn more  |  data sheet