Legacy Mass Flow Controllers & Mass Flow Meters

photo - 1179c General Purpose Mass Flow Controller for Flow Rates up to 20 slm

1179C General Purpose Mass Flow Controller for Flow Rates up to 20 slm

  • Full Scale flow rates from 10 sccm to 20 slm; 1% of Full Scale accuracy
  • Less than 2 second settling time

website  |  data sheet
See GE50A for superior performance replacement

photo - 179C Metal-sealed Mass Flow Meter for Flow Rates up to 20 slm

179C Metal-sealed Mass Flow Meter for Flow Rates up to 20 slm

  • Full Scale flow rates from 10 sccm to 20 slm; 1% of Full Scale accuracy
  • Analog I/O: 0 to 5 VDC

website  |  data sheet
See GM50A for superior performance replacement

photo - MC20A Metal-sealed Mass Flow Controllers for Flow Rates up to 200 slm

ALTA MC20A Metal-sealed Mass Flow Controllers for Flow Rates up to 200 slm

  • Full scale flow rates from 50 slm sccm to 200 slm; 1% of Setpoint accuracy
  • Less than 2 second settling time
  • Multi-range/multi-gas capability
  • Analog (0 to 5VDC) and digital I/O (DeviceNet™ & Profibus) options

website  |  data sheet
See P250A for superior performance replacement