High Flow Rate Thermal Mass Flow Controllers & Mass Flow Meters

MKS offers both elastomer and metal sealed mass flow controllers for flow rates up to 1000 slm. Versions are available for standard and harsh environments where protection from water and dust is required.

Common Features:

  • Elastomer and metal sealed MFC/MFM
  • Flow rates up from 50 to 1000 slm
  • Multi-range/multi-gas; 1% of setpoint accuracy
  • Digital and analog I/O
photo - GE250A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller

GE250A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm

  • Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
  • 1 to 2 second settling time
  • Standard closed conductance leak rate of less than 1.0% of Full Scale

website  |  data sheet

photo - IE250A Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller

IE250A Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Industrial Environments

  • Flow Rates from 100 to 250 slm
  • Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
  • 1 to 2 second settling time
  • Standard closed conductance leak rate of less than 1.0% of Full Scale

website  |  data sheet

photo - IE500A  Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Industrial Environments

IE500A Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Industrial Environments

  • Flow Rates from 250 to 500 slm
  • Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
  • 1 to 2 second settling time
  • Standard closed conductance leak rate of less than 1.0% of Full Scale

website  |  data sheet

photo - IE1000A  Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Industrial Environments

IE1000A Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Industrial Environments

  • Flow Rates from 500 to 1000 slm
  • Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
  • 1 to 2 second settling time
  • Standard closed conductance leak rate of less than 1.0% of Full Scale

website  |  data sheet

photo - P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm

P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm

  • Metal sealed MFC
  • Full scale flow rates from 100 slm to 250 slm
  • Multi-gas/multi-range with 1% of setpoint accuracy
  • Analog I/O: 0 to 5 VDC; 4 to 20 mA
  • Digital I/O: DeviceNet, RS485, Profibus

website  |  data sheet

photo - P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm

IM250A High Performance Mass Flow Controller with Ingress Protection, IP66 Rating, for Flow Rates up to 250 slm

  • Metal sealed MFC
  • Full scale flow rates from 100 slm to 250 slm
  • Multi-gas/multi-range with 1% of setpoint accuracy
  • Analog I/O: 0 to 5 VDC; 4 to 20 mA
  • Digital I/O: Consult Factory

website  |  data sheet

photo - 1579A General Purpose Mass Flow Controller for Flow Rates up to 300 slm

1579A General Purpose Mass Flow Controller for Flow Rates up to 300 slm

  • Elastomer sealed MFC
  • Full scale flow rates from 50 slm to 300 slm; 1% of Full Scale accuracy
  • Less than 1 second settling time
  • Analog (0 to 5 VDC) and digital (Profibus) I/O options

website  |  data sheet

photo - 579A General Purpose Mass Flow Meter for Flow Rates up to 300 slm

579A General Purpose Mass Flow Meter for Flow Rates up to 300 slm

  • Elastomer sealed MFM
  • Full scale flow rates from 50 slm to 300 slm; 1% of Full Scale accuracy
  • Analog (0 to 5 VDC) and digital (Profibus) I/O options

website  |  data sheet