Thermal & Pressure-based Mass Flow Controllers & Meters
Mass Flow Controller & Mass Flow Meters from MKS Instruments

photo - G-Series Mass Flow Controllers

G-Series Thermal Mass Flow Controllers & Meters with Fast & Repeatable Performance

G-Series Mass Flow Controllers are a cost effective, high performance family of mass flow controllers well suited for most industries and applications.

Common Features:

  • Elastomer & Metal sealed MFC/MFM; 1.5 inches (38.1 mm) width
  • Full scale MFC flow rates from 5 sccm to 250 slm
  • Multi-gas/multi-range MFC; 1% of setpoint accuracy
  • Digital and analog I/O

See all G-Series Mass Flow Controllers/Meters here

photo - I-Series Industrial Mass Flow Controllers & Meters

I-Series IP66-rated Thermal Mass Flow Controllers & Meters

I-Series Mass Flow Controllers are designed specifically for mass flow controller applications in harsh environments to protect against water and dust. The IP66-rated enclosure for I-Series Mass Flow Controllers protect it from direct water spray (for example, hose-down in bioreactor applications) as well as dust.

Common Features:

  • Elastomer and Metal sealed MFC/MFM; 1.5 inches (38.1 mm) width
  • Full scale MFC flow rates from 5 sccm to 1000 slm
  • Multi-gas/multi-range MFC; 1% of setpoint accuracy
  • Dustproof and waterproof enclosure for harsh environments
  • Digital and analog I/O

See all I-Series Mass Flow Controllers & Meters here

photo - P-Series High Performance Multi-gas, Multi-range Mass Flow Controllers & Meters

P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers

P-Series, high performance mass flow controllers are designed for the most critical process applications where accuracy, repeatability as well as pressure insensitivity are requirements.

Common Features:

  • Metal-sealed MFC/MFM; 1.125 inches (28.6 mm) width
  • Full scale MFC flow rates from 5 sccm to 250 slm
  • Multi-gas/multi-range MFC with pressure insensitive option; 1% of setpoint accuracy
  • Pressure insensitive option
  • Digital & analog I/O

See all P-Series Multi-gas, Multi-range Mass Flow Controllers here

photo - P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm

High-flow Thermal Mass Flow Controllers & Meters

MKS offers both elastomer and metal sealed mass flow controllers for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required.

Common Features:

  • Elastomer & metal sealed MFC/MFM
  • MFC Flow rates up from 50 to 300 slm
  • Multi-range/multi-gas MFC; 1% of setpoint accuracy
  • Digital and analog I/O

See all High Flow Rate Mass Flow Controllers & Meters here

photo - MF1 General Purpose Mass Flow Controller for flow rates up to 20 slm

Compact, General Purpose Thermal Mass Flow Controllers

The MF1's compact size (less than 4 inches high, 3 inches long, 1 inches wide) provides an option where available space is limited such as in many analytical and sputter applications. While small in stature, the elastomer-sealed MF1 offers excellent accuracy and repeatability.

Common Features:

  • Elastomer-sealed MFC
  • Full scale flow rates from 10 sccm to 20 slm
  • Multi-gas/multi-range MFC
  • Digital and analog I/O

Learn more about the MF1 Mass Flow Controllers & Meters here

photo - P2A Metal sealed MFC for low pressure drop operating conditions such as ion implant source gases

Thermal & Pressure-based Mass Flow Controllers for Special Applications

Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material charactertics.

photo - 1179A General Purpose, Elastomer-sealed Mass Flow Controller

Legacy Mass Flow Controllers & Meters

While MKS continues to enhance its Mass Flow Control product line with new models such as those above, there are many more mass flow controller models MKS has provided over the years. MKS continues to offer and provide support for its loyal customer base for these MFCs.

Learn more about the Legacy Mass Flow Controllers & Meters here