DC Power Generators
DC Power Supplies and DC Power Generators

photo - RPDG-100 10kW Pulsed DC Plasma Generator

MKS RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.

RPDG-50 5kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power in a single unit (3U)
Programmable frequency, and duty cycle.

RPDG-100 10kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power in a single unit (3U)
Programmable frequency, and duty cycle.

RPDG-200 20kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power
Programmable frequency, and duty cycle.