Optical Gas Analyzers

MultiGas & AIRGARD® FTIR Gas Analysis Instruments
Precisive® TFS Sensor Platforms

MultiGas & AIRGARD® FTIR (Fourier Transform Infrared) and Process Sense NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.

photo - Precisive 5 TFS Analyzer

The Precisive® TFS (Tunable Filter Spectroscopy) sensor platform consists of a light source, a sample cell (for gases, liquids or solids), a wavelength separating element (spectrometer) and a photo-detector. A wavelength separating element "slices" the wavelength components of the broadband light source which then interacts with the sample molecules. The resulting spectrum acts as "fingerprints" which are used to identify sample components and/or quantify the sample composition.

photo - MultiGas TFS Monitor

The all-optical MultiGas TFS Monitor provides an alternative to the traditional analyzer technologies for trace hydrocarbon, moisture, CO, CO2 and N2O measurements, enabling low cost yet high performance analysis.

photo - Process Sense TFS Sensor

The Process Sense TFS Endpoint Sensor for Chamber Clean Processes features a spectroscopic technique capable of generating a "mini-scan," producing a slice of spectra in the infrared band. The scan provides absorption peaks used to select compounds and provide concentration values.

Product Catalog

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