Flow/Gas Delivery

Mass Flow Control with Mass Flow Controllers, Mass Flow Meters and Flow Verifiers, Advanced Materials Delivery, and Integrated Solutions and Subsystems

  • Mass Flow Controllers from MKS Instruments
  • Flow Ratio Controllers from MKS Instruments
  • Mass Flow Verifiers from MKS Instruments

Accurate, reliable gas flow delivery and control is crucial to many of today’s advanced processes. The MKS family of flow delivery products includes mass flow controllers (MFC), in-situ mass flow verifiers, and flow ratio controllers which accurately and repeatably divide gas flows into precise flow streams to multiple points in the process. MFCs are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our flow measurement and control product design philosophy.

Product Catalog

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Thermal & Pressure-based Mass Flow Controllers & Meters